基于压电陶瓷开环调制的位移测量方法

Displacement measurement method based on piezoelectric ceramic open-loop modulation

Abstract

一种基于压电陶瓷开环调制的位移测量方法,属于测量技术领域,其特征在于对压电陶瓷施加周期性三角波驱动电压,使其往返运动,在相反的运动方向上分别找出对应一定压电陶瓷长度的基准位置,并取得对应此基准位置的驱动电压,计算其平均值。可由所述平均值的变化乘以周期性三角波电压驱动下当驱动电压上升时的位移-驱动电压曲线以及当驱动电压下降时的位移-驱动电压曲线的平均值曲线中接近线性的中段区域的斜率计算出待测位移量。这种方法的优点在于可以有效改善压电陶瓷的迟滞和非线性,提高位移测量的精度;对压电陶瓷进行开环控制即可,没有增加系统复杂性和成本;便于与其它位移测量方法相结合,实现大量程高精度位移测量。
The invention provides a displacement measurement method based on piezoelectric ceramic open-loop modulation, belonging to the technical field of measurement. The displacement measurement method provided by the invention is characterized by comprising the following steps of: applying a periodic triangular wave driving voltage to piezoelectric ceramic to enable the piezoelectric ceramic to reciprocate; respectively finding out reference positions corresponding to a certain length of the piezoelectric ceramic in opposite movement directions and obtaining driving voltages corresponding to the reference positions; and calculating an average value of the driving voltages; and calculating a displacement amount to be detected by multiplying the change of the average value by gradients of middle section areas, which are close to be linear, in an average value curve of a displacement-driving voltage curve in the process of raising the driving voltages and a displacement-driving voltage curve in the process of decreasing the driving voltages under the driving of the periodic triangular wave driving voltage. The method provided by the invention has the advantages of effectively improving the hysteresis and the non-linearity of the piezoelectric ceramic and improving the precision of the displacement measurement; the displacement measurement can be realized by only carrying out open-loop control on the piezoelectric ceramic, so that the system complexity and the cost are not increased, the method is convenient to combine with other displacement measurement methods and the large-scale high-precision displacement measurement can be realized.

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    CN-102829729-BJanuary 14, 2015清华大学一种高增益激光位移传感器的偏振混叠方法
    CN-105423885-AMarch 23, 2016中国科学院长春光学精密机械与物理研究所内置应变片式压电陶瓷的位移检测装置及检测方法
    CN-105423885-BJanuary 05, 2018中国科学院长春光学精密机械与物理研究所内置应变片式压电陶瓷的位移检测装置及检测方法