Simulated electrostatic feedback control method and circuit based on complementary pulse width modulation technology

采用互补脉宽调制技术的模拟静电力反馈控制方法及电路

Abstract

本发明公开了一种采用互补脉宽调制技术的模拟静电力反馈控制方法及电路,该反馈控制电路可与电容式微加速度计以及常见的电容读出前端配合,构成闭环结构的电容式微加速度计读出系统。本发明电路包括用于将外部输入的反馈控制电压Vin_FB与内部产生的锯齿波电压进行比较的比较器,带使能端的锯齿波发生器,用于产生两路互补控制时钟的逻辑块,以及多个静电力反馈控制开关。整个电路受一路静电力反馈控制时钟phFB控制。本发明电路通过三端子接口TOP、CTR、BOT与电容式微加速度计相连接,实现了高线性度的模拟静电力反馈,且其线性度对微加速度计的结构失配不敏感。
The invention discloses a simulated electrostatic feedback control method and circuit based on a complementary pulse width modulation technology. The feedback control circuit can be combined with a capacitive-type micro-accelerometer and a common capacitance read-out front end to form a closed-loop capacitive-type micro-accelerometer read-out system. The circuit comprises a comparing unit for comparing an externally-input feedback control voltage (Vin-FB) with an internally-generated saw-tooth voltage, a saw-tooth wave generator with an enabling end, a logic block used for generating two complementary control clocks, and a plurality of electrostatic feedback control switches. The whole circuit is controlled by an electrostatic feedback control clock (phFB). The circuit is connected with the capacitive-type micro-accelerometer through three terminal interfaces TOP, CTR and BOT to achieve the effect of high-linearity simulated electrostatic feedback, and the degree of linearity is insensitive to structural mismatch of the micro-accelerometer.

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